专利名称：Polycrystalline Silicon Rod For Zone
Reflecting And A Process For The
Production Thereof
发明人：Mikhail Sofin,Hans-Christof Freiheit,Heinz
Kraus
申请号：US12119558
申请日：20080513reaction rod
公开号：US20080286550A1
公开日：
20081120
专利内容由知识产权出版社提供
专利附图：
摘要：The invention relates to a polysilicon rod for FZ applications obtainable by
deposition of high-purity silicon from a silicon-containing reaction gas, which has been thermally decomposed or reduced by hydrogen, on a filament rod. The polysilicon rod contains, surrounding the filament rod, an inner zone having but few needle crystals, small in size, an outer zone having a relatively small amount of larger needle crystals, and a smooth transition zone between the inner and outer zones. The polysilicon rods are obtained in high yield and can be refined in one pass in an FZ process.
申请人：Mikhail Sofin,Hans-Christof Freiheit,Heinz Kraus
地址：Bughausen DE,Burghausen DE,Zeilarn DE
国籍：DE,DE,DE
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